SVTA MBE Systems:
- Nitride MBE Systems
- Oxide MBE Systems
- III-V and II-VI MBE Systems
- Silicon MBE Systems
- Metal Organic Systems
- Laser MBE Systems
- In situ Cleaving System
Molecular Beam Epitaxy (MBE) is a key technology due to the unique structures and exact dimensional control that can be achieved.
MBE Systems from SVTA are high performance tools for thin film growth which can be configured for a wide range of material applications. SVTA manufactures these MBE chambers, deposition sources, and essential process monitors based on the full growth process knowledge gained from our in house applications laboratory and trained staff. This integration results in excellent control over quality and cost, offering the most cost effective tool available for MBE.
SVTA MBE systems create an ultra-pure environment for precision fabrication of thin film structures for semiconductor, opto-electronic, photovoltaic and magnetic applications. SVTA MBE equipment is specially engineered for the materials they produce. The MBE Systems are equipped with hardware and software capabilities to monitor, display and control critical growth parameters.
SVTA 35-N System
SVTA 200 mm Cluster System
SVTA Systems are designed around a modular configuration consisting of several functional units. The modular system concept is a flexible and reliable way of adapting to different customer needs. Typically, there are at least two separate modules, one for the deposition process and one for wafer loading/sample preparation. There are other processing modules, such as cluster tool or material analysis modules that may be added depending on the customer needs. Systems with multiple growth modules for “incompatible” materials are available. Each module has its own independent UHV pumping system and can be isolated from other modules by gate valves. This arrangement makes it possible to perform various system functions independently and concurrently: substrate loading, sample treatment, film growth, and sample analysis.
Contact SVTA for more information.
