SVT Associates’ gas injectors are designed for thin film deposition systems that utilize a gaseous source, such as silicon epitaxy, Nitride MBE or Laser MBE systems. The gas injectors operate on the principle of thermally cracking the gas into smaller atomic/molecular species using a single filament gas tube furnace. These sources have very high dissociation efficiency even at low power levels due to careful design of the heating zone. A cooling shroud minimizes heat load into the system environment for ultra-low contamination levels.
Single and multiple gas injector sources are available. The source can be equipped with a pressure based gas handling system for safe and accurate gas delivery.
MBE Gas Injector Applications:
- Etching (H, Cl, CBr4…)
- Oxidation, Nitridation and Oxynitrides (NH3, O2…)
- GSMBE (AsH3, PH3…)
- MOMBE (TMA, TMG….)
Technical Documentation:
Contact SVTA for more information.
Gas Injector