The SVTA-BFM beam flux monitor is an accessory used for precision measurement of beam equivalent pressures of atomic or molecular beams in MBE systems. A Bayard-Alpert type ionization gauge is mounted on a linear translation system that allows movement of the monitor from its standby retracted position to the measurement position close to the substrate. The head of the assembly incorporates shielding to prevent deposition of the substrate during measurement. A low noise electronics system guarantees stable detection and high resolution. The BFM may also be used as a secondary gauge to monitor the pressure inside the growth chamber. An optional software interface allows convenient operation from a computer.
Specifications | |
| Measurement Type: | Bayard-Alpert ion gauge |
| Flange Size: | 2.75″ or 4.5″ CF |
| In Vacuum Diameter (max): | 1.35″ |
| In Vacuum Length (min): | 4.8″ |
| Bakeout Temperature: | 250 °C |
| Linear Travel Length: | 4″ or higher |
| Measurement Range: | 3e-11 to 7.5e-4 torr |
Beam flux monitor apparatus
End on view of beam flux monitor
Technical drawing for beam flux monitor