SVTA source shutters are designed for quick motion and long cycle life. The source shutter assembly consists of an in-vacuum component, an external component and a shutter blade. SVTA offers two basic designs – a magnetically coupled design and a bellows coupled design. With the magnetically coupled design the service life is extended over a bellows style type.
Models are available in 3 or 4 inch stroke lengths and mounts on a 5″x2″ rectangular or 1.33″/4.5″/6.0″ CF flange. The shutter blades are made of either Molybdenum or Tantalum. Other materials are available on request. SVTA also offers a full computer controllable shutter package that includes a 19″ rack mountable control unit (SC200M).
As an option, SVTA also offers integral shutters (SVTA-IS) which are integrated into individual deposition sources, avoiding the need for a separate shutter installation port. These can be either pneumatically or manually actuated.
Features:
- < 150msec Open/Close Actuation at 3″
- Soft Action To Minimize Mechanical Shock
- Pneumatic Actuation Requires Only 10-15 psi
- Simple and Fast Removal for Blade Cleaning/Replacing
- Highly Dependable
- Long Cycle Lifetime
- Linear Magnetically Coupled Models
- Eliminate Need For Bellows
- Reduces Particle and Outgassing Generation
Magnetic Shutter SS-100
Linear Pneumatic Shutter LPS-100
Shutter Actuation Speed
Rotary Bellows Coupled Shutter RS-100