A heated viewport provides optical access to the vacuum chamber where the window portion is heated to prevent condensation of growth material. Unlike a standard shutter the heated viewport provides long term optical access where transparency is maintained. This is ideal when combined with in situ optical monitoring tools such as AccuFlux.

Available viewport sizes are 2.75″ (on a 4.5″ flange) and 4.5″ (on a 6″ flange). Maximum internal temperatures of the viewport surface are 500 C for the 2.75″ version and 400 C for the 4.5″ version. Power is supplied via AC current modulated by a temperature controller.

Specifications

HW275 Heated Viewport

Mounting Flange:2.75″/4.5″ CF
Weight:5 lbs
Thermocouple:Type-K
Controller Fuse:0.5 A, 120-240 VAC
Operation Temperature:250°C typical, 500 °C maximum
Clear Aperture:1.3″ diameter
Viewport Material:UV fused silica, sapphire heated disc

HW450 Heated Viewport

Mounting Flange:4.5″/6.0″ CF
Weight:10 lbs
Thermocouple:Type-K
Controller Fuse:1.5 A, 120-240 VAC
Operation Temperature:250°C typical, 400 °C maximum
Clear Aperture:2.3″ diameter
Viewport Material:UV fused silica, sapphire heated disc
Ultra high vacuum chamber assembly with multiple deposition ports

Photo of the heated viewport

Beam flux calibration graph for ultra high vacuum deposition source

Temperature versus power curve for heated viewport

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