SVT Associates offers Atomic Layer Deposition (ALD) systems as versatile research deposition tools for thermal or energy enhanced ALD. With up to 8 precursor lines, a hot wall and cross flow deposition, a wide range of applications may be performed from a single system. Sample introduction is rapid and convenient with a quick hatch or the optional load lock. The NorthStar ALD system can be interfaced with other deposition and metrology tools. Integration of in-situ metrology tools and the RoboALD software/system automation increases process reproducibility. SVTA is your source for cost effective atomic layer deposition equipment.
NorthStar ALD Systems
Atomic Layer Deposition System Applications:
- High-k Dielectrics
- Nanocoatings
- Surface Modification Layers
- Corrosion protection layers
- Moisture barrier layers
- Device Encapsulations
- MEMS
- Photonic Crystals
Atomic Layer Deposition Equipment Options:
- Load Lock for rapid sample exchange
- Plasma Component
- Ozone Delivery System
- Residual Gas Analysis — QMS
- Quartz Crystal Deposition Monitor
- In-Situ Ellipsometry
- Transfer to UHV deposition systems
Technical Documentation:
Contact SVTA for more information.