Description
SVT Associates’ D Series of effusion cell is designed to evaporate a smaller quantity of materials, such as Silicon and Beryllium, commonly used as dopants in semiconductor growth. Models are available for mounting on either a 2.75″ or 4.50″ OD CF. All cells are thoroughly tested and characterized before shipment. Water cooling shroud and integrated shutter are optional for 4.50″ CF flange or larger. Because of its small size it is ideally suited for dopant applications.
Specifications | |
| Temperature Range | 0 °C – 1,400 °C |
| Power Requirement | 600 W or 1kW |
| Temperature Stability | +1 / -0.1 °C |
| Temperature Reproducibility | +1 / -0.1 °C |
| Thermocouple Type | Type C |
| Crucible Size* | 5 cc, 6 cc, 16 cc Crucibles have tapered wall for best coverage. |
| Crucible Materials* | PBN or Aluminum Oxide |
| Standard in vacuum Length* | 12.0″ |
| Mounting Flange | 2.75″ or 4.50″ OD – CF |
| Electrical Connectors | Filament: Amphenol Circular T/C: Omega Submini |
| *Other sizes, materials, and lengths are available — contact SVT Associates for details. | |
| SVTA-D-(Crucible Size)-(Flange Size) | |||
| Flange Size | 2.75″ | 4.5″ | |
| Crucible Size | 5 cc | 5 cc | |
| 6 cc | 6 cc | ||
| 16 cc | |||
