The SVTA RF Valved Cracker Source enables generation of fully dissociated, atomic species from solid group V and group VI elements. It incorporates a large capacity effusion zone, a heated valve zone and an RF cracking zone. RF cracking produces thermal energies much higher than heated filaments can provide, resulting in fully cracked species for highest reactivity and improved material incorporation. Its high speed valve mechanism allows rapid flux modulation and conservation of material charge when in idle mode.
Custom aperture and chamber designs are available upon request to tailor the flux to individual applications. Optional equipment such as RoboRF provide automated operation and allow the user to log data as well as write recipes for reproducible deposition.
Features:
- Models available for S, Se, As, Sb and Te
- Highest dissociation efficiency
- Improved material yield
- Optical port for plasma monitoring
- Custom apertures for beam shaping
- Valved flux control
Specifications | |
| RF Power Level: | 100-500 W |
| Gas Flow Rate: | 0.1-2.0 sccm |
| Mounting Flange: | 4.5″ CF |
| Source Diameter (in vacuum): | 2.35″ |
| Water Cooling: | 0.17 gpm |
| RF Matching Network: | manual tuning (automatic optional) |
| Plasma Chamber: | PBN, alumina or quartz |
Valved RF Cracking Source