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Why SVTA?
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About
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Application Checklist to Ensure Process Compatibility

Application Checklist to Ensure Process CompatibilitySVT Associates

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Contact Information

Name*

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Title

Company*

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Street Address Address Line 2 City State / Province / Region ZIP / Postal Code Country

Phone Number*

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Checklist Questions

General process type: (e.g., MBE, MOCVD, VPE, etc.)

Deposition chamber manufacturer & model number (Observation Geometry), view-port diameter, and material

Substrate material: (e.g., Silicon, GaAs, etc.)

Substrate size & thickness

Film material structure

Deposition rates

Substrate temperature range of interest

How is the substrate heated? (e.g., conductive, radiative, etc.)

Which of the following are required monitor parameters?

Substrate Temperature

Yes

No

Film Thickness

Yes

No

Film Index of Refraction

Yes

No

Does the substrate move during deposition?

Yes

No

Is there clearance for the optical head (125 x 125 x 150 mm) near the viewport?

Yes

No

Are there other sources of light or heat in the vacuum chamber? (e.g., filaments, effusion cells)

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