Thin Film Process Monitoring

AccuTemp™

Advanced System for Real-time Measurement of Substrate Temperature, Growth Rate, and Film Index of Refraction During MBE and MOCVD Thin Film Growth.

AccuFlux™

Turn-Key System for Real-Time deposition Flux Monitoring and Composition Control During Thin Film Deposition Processes.

RHEED

RHEED Image Analysis Software for Diffraction Studies, Strain Analysis, and Growth Rate Measurement to Optimize Material Quality During Deposition.

In-Situ Cathodoluminescence

Real-time Measurement of Composition, Optical Quality and Doping Level of Nitride and Oxide Material During Thin Film Deposition.

Contact SVTA for more information.