Thin Film Process Monitoring

AccuTemp™

Advanced System for Real-time Measurement of Substrate Temperature, Growth Rate, and Film Index of Refraction During MBE and MOCVD Thin Film Growth.

AccuTemp

AccuFlux™

Turn-Key System for Real-Time deposition Flux Monitoring and Composition Control During Thin Film Deposition Processes.

Deposition Flux Monitor
AccuFlux

 


RHEED

RHEED Image Analysis Software for Diffraction Studies, Strain Analysis, and Growth Rate Measurement to Optimize Material Quality During Deposition.


RHEED Electron Gun

Video RHEED

In-Situ Cathodoluminescence

Real-time Measurement of Composition, Optical Quality and Doping Level of Nitride and Oxide Material During Thin Film Deposition.

MBE Components
CL Detector

Contact SVTA for more information.