Thin Film Process Monitoring
AccuTemp™
Advanced System for Real-time Measurement of Substrate Temperature, Growth Rate, and Film Index of Refraction During MBE and MOCVD Thin Film Growth.
![](images/site/thin_film_process_photo1.jpg)
AccuFlux™
Turn-Key System for Real-Time deposition Flux Monitoring and Composition Control During Thin Film Deposition Processes.
![Deposition Flux Monitor Deposition Flux Monitor](images/site/thin_film_process_photo2.jpg)
RHEED
RHEED Image Analysis Software for Diffraction Studies, Strain Analysis, and Growth Rate Measurement to Optimize Material Quality During Deposition.
![]() RHEED Electron Gun
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![]() Video RHEED
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In-Situ Cathodoluminescence
Real-time Measurement of Composition, Optical Quality and Doping Level of Nitride and Oxide Material During Thin Film Deposition.
![MBE Components MBE Components](images/site/thin_film_process_photo5.jpg)
Contact SVTA for more information.