Versatile Compact Research System
SVT Associates’ SMART NanoFab MBE system is the perfect combination of small footprint and large capability. The table-top UHV chamber includes a series of ports to accommodate a wide selection of deposition sources and process monitoring tools.
SMART NanoFab MBE Applications
- III-V
- II-VI
- II-Oxides
- III-Nitrides
- Multi-Technique Deposition MBE
SMART NanoFab MBE Equipment Options
- Load Lock for rapid sample exchange
- RF Plasma Source
- Deposition Sources
- In-Situ Process Monitoring Tools
Deposition Sources and Monitoring Tools
- Effusion Cells
- RF Plasma Source
- Gas Injection
- RHEED and RHEED Image Analysis Software
- AccuFlux In-Situ Process Monitor
- Quartz Crystal Monitor
- Linear Flux Monitor for Calibration
Technical Documentation
Contact SVTA for more information.
SMART NanoFab MBE System