Dopant Effusion Cell
Description SVT Associates’ D Series is designed to evaporate a smaller quantity of materials, such as Silicon and Beryllium. Models are available for mounting on either a 2.75" or 4.50" OD CF. All cells are thoroughly tested and characterized before shipment. Water cooling shroud and integral shutter are optional for 4.50" CF flange or larger. Because of its small size it is ideally suited for dopant applications. |
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