Atomic Layer Deposition Systems

SVT Associates' NorthStar™ Atomic Layer Deposition (ALD) system is a versatile research deposition tool for thermal or energy enhanced ALD. With up to 8 precursor lines and a hot wall — cross flow deposition chamber, a wide range of applications may be performed from a single system. Sample introduction is rapid and convenient with a quick hatch or the optional load lock. The NorthStar ALD system can be interfaced with other deposition and metrology tools. Integration of in-situ metrology tools and the RoboALD software/system automation increases process reproducibility. SVTA is your source for cost effective atomic layer deposition equipment.
NorthStar ALD Systems

Atomic Layer Deposition System Applications:

  • High-k Dielectrics
  • Nanocoatings
  • Surface Modification Layers
  • Corrosion protection layers
  • Moisture barrier layers
  • Device Encapsulations
  • MEMS
  • Photonic Crystals

Atomic Layer Deposition Equipment Options:

  • Load Lock for rapid sample exchange
  • Plasma Component
  • Ozone Delivery System
  • Residual Gas Analysis — QMS
  • Quartz Crystal Deposition Monitor
  • In-Situ Ellipsometry
  • Transfer to UHV deposition systems

Technical Documentation:

Contact SVTA for more information.